Laser technologies for manufacturing of advanced materials and devices

Jan J. Dubowski

doi:10.1117/12.387595

7 June 2000 Laser technologies for manufacturing of advanced materials and devices

Jan J. Dubowski

Proceedings Volume 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V; (2000) https://doi.org/10.1117/12.387595
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States

Abstract

As demand is growing for devices capable of performing new and increased numbers of operations within an ever shrinking physical volume the laser has become an increasingly important tool helping to overcome the limitations of conventional microfabrication techniques. In addition to classical applications of lasers such as via hole drilling, trimming or pulsed laser deposition of thin films, there have been new developments of laser-based technologies for the fabrication of advanced micro- and nano-devices. Of particular interest for optoelectronic and photonic applications is the potential of the laser for the fabrication of integrated and monolithically integrated photonic devices and circuits.

Citation Download Citation

Jan J. Dubowski "Laser technologies for manufacturing of advanced materials and devices", Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); https://doi.org/10.1117/12.387595

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available