Scribing blue LED wafer using laser-induced plasma-assisted ablation with a Q-switched Nd:YAG laser

JongMoo Lee; Jun-Ho Jang; Tae-Kyung Yoo

doi:10.1117/12.387560

7 June 2000 Scribing blue LED wafer using laser-induced plasma-assisted ablation with a Q-switched Nd:YAG laser

JongMoo Lee, Jun-Ho Jang, Tae-Kyung Yoo

Proceedings Volume 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V; (2000) https://doi.org/10.1117/12.387560
Event: Symposium on High-Power Lasers and Applications, 2000, San Jose, CA, United States

Abstract

Transparent materials, such as sapphire, are found to be scribed and cut freely by sparks form metal surface on which q-switched Nd:YAG laser beam is focused through the transparent materials. This method is successfully applied to split each device for a blue LED wafer including about ten thousands of blue LEDs grown on a sapphire wafer.

Citation Download Citation

JongMoo Lee, Jun-Ho Jang, and Tae-Kyung Yoo "Scribing blue LED wafer using laser-induced plasma-assisted ablation with a Q-switched Nd:YAG laser", Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); https://doi.org/10.1117/12.387560

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