Thin film windows for use in a bulge tester and as a piezoelectric actuator

Dryver R. Huston; Wolfgang Sauter; Christophe Broetz; Peter A. Sonntag; Walter J. Varhue

doi:10.1117/12.388899

21 June 2000 Thin film windows for use in a bulge tester and as a piezoelectric actuator

Dryver R. Huston, Wolfgang Sauter, Christophe Broetz, Peter A. Sonntag, Walter J. Varhue

Proceedings Volume 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS; (2000) https://doi.org/10.1117/12.388899
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

This paper reports the results of experimental studies using a bulge tester and accompanying models. The bulge tester applies a load on the backside of the thin film and measures the resulting deflection. The load-deformation data can then be used to establish a mode that can be used to determine Young's modulus and the in-plane stress of the film. A variety of different films are tested under different conditions and the results are compared to theoretical values and to the result of a non-linear finite element model. The approach of the computer model is inverse to the tester. The determined values are used as input for the model and the load-deformation data is the output. The experimental results are found to be in excellent agreement with the numerical prediction. The applicability of using a thin piezoelectric film on top of another film in a window as an actuator is also investigated. The ultimate goal is to create a smart thin film window that can precisely sense and control stretching and/or deflection of the base film. This could be very useful in lithography procedures in order to align and control the mask or particular potions of the mask.

Citation Download Citation

Dryver R. Huston, Wolfgang Sauter, Christophe Broetz, Peter A. Sonntag, and Walter J. Varhue "Thin film windows for use in a bulge tester and as a piezoelectric actuator", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388899

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KEYWORDS

Thin films

Photomasks

Semiconducting wafers

Actuators

Silicon

Silicon carbide

Diamond

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