Prospects for very high repetition rate lasers for microlithography

Igor Bragin; Vadim Berger; Rainer Paetzel; Uwe Stamm; Andreas Targsdorf; Juergen Kleinschmidt; Dirk Basting

doi:10.1117/12.389003

5 July 2000 Prospects for very high repetition rate lasers for microlithography

Igor Bragin, Vadim Berger, Rainer Paetzel, Uwe Stamm, Andreas Targsdorf, Juergen Kleinschmidt, Dirk Basting

Proceedings Volume 4000, Optical Microlithography XIII; (2000) https://doi.org/10.1117/12.389003
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

The demand of high throughput and good energy dose stability of DUV scanner systems result in the requirement of laser repetition rates above 2 kHz for lithography production tools at 193 nm and 157 nm. Also in 248 nm lithography, dose energy stability could be improved by higher repetition rates from the laser. We have investigated the possibilities and limits of high repetition rate performance of laser discharge units for DUV lithography lasers. A new chamber has been developed with electrode configuration, pre- ionization system and high speed gas flow system for very high repetition rate operation. Acoustic resonances in the frequency range of interest have been prevented by design. With new solid-state pulsed power modules which support long pulse gain modulation and high precision high voltage power supplies very high repetition rates have been demonstrated. For 248 nm lasers repetition rates above 5 kHz have been achieved, for 193 nm laser above 4.5 kHz. 157 nm lasers can be operated above 2.5 kHz. Data of the laser performance as e.g. power and energy stability are given for the various wavelengths.

Citation Download Citation

Igor Bragin, Vadim Berger, Rainer Paetzel, Uwe Stamm, Andreas Targsdorf, Juergen Kleinschmidt, and Dirk Basting "Prospects for very high repetition rate lasers for microlithography", Proc. SPIE 4000, Optical Microlithography XIII, (5 July 2000); https://doi.org/10.1117/12.389003

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available