RF-Plasma Deposition Of Hydrogenated Hard Carbon Thin Films

A. Bubenzer; B. Dischler; G. Brandt; P. Koidl

doi:10.1117/12.935534

28 November 1983 RF-Plasma Deposition Of Hydrogenated Hard Carbon Thin Films

A. Bubenzer, B. Dischler, G. Brandt, P. Koidl

Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935534
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

Hydrogenated amorphous carbon (a-C:H) thin films were prepared from hydrocarbons such as CH4, C2H4 and C₆H₆ in a capacitively coupled RF-discharge. a-C:H films which are electrically insulating (10 12 2Ωcm), transparent in the IR and very hard (on the order of 1400 kp/mm2 Knoop hardness) were deposited on glass, quartz, Si, Ge, SiC, GaAs and Gd3Ga₅O1₂. This method allows large area (several inch diameter) homogeneous coatings and using C₆H₆ also gives high deposition rates on the order of 1000 Å/min. The deposition process is described and the influence of various deposition parameters is discussed. It is shown that by means of the two parameters negative self bias and gas pressure coating properties such as refractive index can be easily tuned and controlled. The application of a-C:H as a single layer antireflection coating on Ge for 10.6 [im is demonstrated; the reflection at 10.6 pri is less than 0.2%.

Citation Download Citation

A. Bubenzer, B. Dischler, G. Brandt, and P. Koidl "RF-Plasma Deposition Of Hydrogenated Hard Carbon Thin Films", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935534

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available