Micro-optomechanical infrared receiver with optical readout: MIRROR

Paul R. Norton; M. Mao; Thomas M. Perazzo; Yang Zhao; O. Kwon; Arunava Majumdar; John B. Varesi

doi:10.1117/12.391720

17 July 2000 Micro-optomechanical infrared receiver with optical readout: MIRROR

Paul R. Norton, M. Mao, Thomas M. Perazzo, Yang Zhao, O. Kwon, Arunava Majumdar, John B. Varesi

Proceedings Volume 4028, Infrared Detectors and Focal Plane Arrays VI; (2000) https://doi.org/10.1117/12.391720
Event: AeroSense 2000, 2000, Orlando, FL, United States

Abstract

An uncooled infrared detector having an optical readout is described. Infrared heat is sensed with bimaterial cantilevers which bend in response to temperature changes. One side of the bimaterial cantilever is an optical reflector. Visible light reflecting off the bent cantilever is detected with a CCD camera to provide the sensor output. We describe this device as a micro-optomechanical infrared receiver with optical readout -- MIRROR. Devices based upon this principle have successfully imaged infrared. Changes to the system are in progress to improve sensitivity.

Citation Download Citation

Paul R. Norton, M. Mao, Thomas M. Perazzo, Yang Zhao, O. Kwon, Arunava Majumdar, and John B. Varesi "Micro-optomechanical infrared receiver with optical readout: MIRROR", Proc. SPIE 4028, Infrared Detectors and Focal Plane Arrays VI, (17 July 2000); https://doi.org/10.1117/12.391720

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