Chemical vapor detection using microfabricated flexural plate silicon resonator arrays

Brian T. Cunningham; Richard A. Kant; Chris Daly; Marc S. Weinberg; Jane Wu Pepper; Christopher Clapp; Rob Bousquet; Brenda Hugh

doi:10.1117/12.394060

28 July 2000 Chemical vapor detection using microfabricated flexural plate silicon resonator arrays

Brian T. Cunningham, Richard A. Kant, Chris Daly, Marc S. Weinberg, Jane Wu Pepper, Christopher Clapp, Rob Bousquet, Brenda Hugh

Author Affiliations +

Proceedings Volume 4036, Chemical and Biological Sensing; (2000) https://doi.org/10.1117/12.394060
Event: AeroSense 2000, 2000, Orlando, FL, United States

Abstract

This presentation will describe the design, fabrication, and testing of 2-element, and 8-element micro-Chemical Analysis Array ((mu) CANARY) sensor chips and address electronics. The detailed performance characterization of (mu) CANARY sensors for vapor and liquid phase detection will be presented. For vapor detection, NRL has applied polymer receptor coatings targeted at detection of chemical weapon agents, and has performed extensive chemical vapor exposure tests using two chemical weapon simulants and four vapor phase interferents. Data describing temperature dependence, long term/short term drift stability, detection limits, detection linearity, and vapor selectivity will be presented.

Citation Download Citation

Brian T. Cunningham, Richard A. Kant, Chris Daly, Marc S. Weinberg, Jane Wu Pepper, Christopher Clapp, Rob Bousquet, and Brenda Hugh "Chemical vapor detection using microfabricated flexural plate silicon resonator arrays", Proc. SPIE 4036, Chemical and Biological Sensing, (28 July 2000); https://doi.org/10.1117/12.394060

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