Pellicle degradation and its effect on surrounding environment in ArF lithography

Junji Miyazaki; Takashi Okagawa; Keisuke Nakazawa; Toshiro Itani; Shigeto Shigematsu; Hiroaki Nakagawa

doi:10.1117/12.392067

19 July 2000 Pellicle degradation and its effect on surrounding environment in ArF lithography

Junji Miyazaki, Takashi Okagawa, Keisuke Nakazawa, Toshiro Itani, Shigeto Shigematsu, Hiroaki Nakagawa

Proceedings Volume 4066, Photomask and Next-Generation Lithography Mask Technology VII; (2000) https://doi.org/10.1117/12.392067
Event: Photomask and Next Generation Lithography Mask Technology VII, 2000, Kanagawa, Japan

Abstract

We investigated pellicle degradation during ArF laser irradiation and its effect on a substrate. The chemical structure of the pellicle film was not changed but its molecular weight decreased. F and C were observed on the substrate surface after irradiation. The source of the contamination was apparently film evaporation caused by ArF laser irradiation. Further experiments under conventional conditions, not accelerated conditions, will be necessary.

Citation Download Citation

Junji Miyazaki, Takashi Okagawa, Keisuke Nakazawa, Toshiro Itani, Shigeto Shigematsu, and Hiroaki Nakagawa "Pellicle degradation and its effect on surrounding environment in ArF lithography", Proc. SPIE 4066, Photomask and Next-Generation Lithography Mask Technology VII, (19 July 2000); https://doi.org/10.1117/12.392067

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