Effects of Pt/RuO2 hybrid bottom electrodes on the electrical properties of BST thin films

Tianjin Zhang; Hong Ni

doi:10.1117/12.408340

29 November 2000 Effects of Pt/RuO2 hybrid bottom electrodes on the electrical properties of BST thin films

Tianjin Zhang, Hong Ni

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408340
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

The effects of the different bottom electrodes on the electrical properties of BST thin films have been investigated. The electrical properties of BST films spin- coated on Pt/RuO₂ hybrid electrodes were improved compared to the films on RuO₂ electrodes. The dielectric constant and dissipation factor of the 0.1 micrometers BST thin films on Pt/RuO₂ bottom electrodes were 582 and 0.035 at zero bias voltage. The leakage current density of this film was 7.2 X 10^-8 A/cm² at 1.5 V which was about one order of magnitude lower than leakage current density (5.2 X 10^-7 A/cm² at 1.5 V) of BST capacitor with RuO₂ films.

Citation Download Citation

Tianjin Zhang and Hong Ni "Effects of Pt/RuO2 hybrid bottom electrodes on the electrical properties of BST thin films", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408340

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