RFTIR measurement on backside-thinned detector film of InSb infrared focal plane arrays

Bo-Liang Chen; Hua Yang; Xiaoning Hu; Juncao Lin

doi:10.1117/12.408419

29 November 2000 RFTIR measurement on backside-thinned detector film of InSb infrared focal plane arrays

Bo-Liang Chen, Hua Yang, Xiaoning Hu, Juncao Lin

Author Affiliations +

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408419
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

Reflection Fourier transform infrared (RFTIR) measurements were performed on backside-illuminated InSb infrared focal plane arrays for thinning process monitoring. InSb detector film thickness and its variation across the film can be measured from the RFTIR spectra taken by this contactless and non-destructive technique.

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Bo-Liang Chen, Hua Yang, Xiaoning Hu, and Juncao Lin "RFTIR measurement on backside-thinned detector film of InSb infrared focal plane arrays", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408419

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