Synthesis, dielectric characteristic, and microstructure of acetate-based (Ba,Sr)TiO3 thin films

Huyong Tian; Weigen Luo; Xinghua Pu; Pingsun Qiu; Xiyun He; Aili Ding

doi:10.1117/12.408338

29 November 2000 Synthesis, dielectric characteristic, and microstructure of acetate-based (Ba,Sr)TiO₃ thin films

Huyong Tian, Weigen Luo, Xinghua Pu, Pingsun Qiu, Xiyun He, Aili Ding

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408338
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

A modified sol-gel process with acetate based precursor solutions for Sr-doped barium titanate thin films is presented. A four-step heating procedure was employed to prepare the Ba_0.8Sr_0.2TiO₃ thin films. The thermal decomposition and crystallization temperatures of the precursors were determined by means of FTIR, TGA/DTA, and XRD measurements. The nonlinear C-V characteristics are due to strong depletion that can not originate from the BST/electrode interface, but must come internally from the BST films.

Citation Download Citation

Huyong Tian, Weigen Luo, Xinghua Pu, Pingsun Qiu, Xiyun He, and Aili Ding "Synthesis, dielectric characteristic, and microstructure of acetate-based (Ba,Sr)TiO₃ thin films", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408338

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