Thickness monitoring method of infrared optical thin film irregular coatings

Minfeng Hu; Furong Zhu; Fengshan Zhang

doi:10.1117/12.408383

29 November 2000 Thickness monitoring method of infrared optical thin film irregular coatings

Minfeng Hu, Furong Zhu, Fengshan Zhang

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408383
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

A kind of method proposed in dealing with irregular coatings during optical thickness automatic monitoring of coating process in this paper, and accordingly appropriate program algorithm is also listed here, comparison results between theoretical calculation and this application indicates its efficiency and utility.

Citation Download Citation

Minfeng Hu, Furong Zhu, and Fengshan Zhang "Thickness monitoring method of infrared optical thin film irregular coatings", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408383

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