Excimer laser microfabrication and micromachining

Malcolm C. Gower

doi:10.1117/12.405698

6 November 2000 Excimer laser microfabrication and micromachining

Malcolm C. Gower

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405698
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser microfabrication and micromachining as technologies that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper describes some of these industrial applications.

Citation Download Citation

Malcolm C. Gower "Excimer laser microfabrication and micromachining", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405698

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