Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space

Eui-Hyeok Yang; Dean V. Wiberg; Richard G. Dekany

doi:10.1117/12.405766

31 October 2000 Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space

Eui-Hyeok Yang, Dean V. Wiberg, Richard G. Dekany

Author Affiliations +

Proceedings Volume 4091, Imaging Technology and Telescopes; (2000) https://doi.org/10.1117/12.405766
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

A novel Microelectromechanical Systems (MEMS) deformable mirror (DM) technology for large, light weight, segmented space telescopes is being proposed. This technology is reported to provide an unprecedented imaging capability in a visible and near infrared spectral range. The MEMS-DM proposed in this paper consists of a continuous membrane mirror supported by electrostatic actuators with pixel-to-pixel spacing as small as 200 micrometer. An array of 4 X 4 electrostatic actuators for the DM has been successfully fabricated by a new membrane transfer technique. The fabricated actuator membrane has been characterized by using an optical surface profiler. The actuator shows a vertical deflection of 0.37 micrometer at 55 V. This device can also address requirements for smaller size and high resolution applications involving optical transmission through aberrating mediums such as imaging and optical communications through atmospheres, high resolution biometric retina signatures through the eye and endoscopic investigation of tissues and organs.

Citation Download Citation

Eui-Hyeok Yang, Dean V. Wiberg, and Richard G. Dekany "Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space", Proc. SPIE 4091, Imaging Technology and Telescopes, (31 October 2000); https://doi.org/10.1117/12.405766

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