Morphology and mechanical properties of oblique angle columnar thin films

Robert A. Knepper; Russell F. Messier

doi:10.1117/12.390588

30 June 2000 Morphology and mechanical properties of oblique angle columnar thin films

Robert A. Knepper, Russell F. Messier

Proceedings Volume 4097, Complex Mediums; (2000) https://doi.org/10.1117/12.390588
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

The anisotrophy of the morphology in oblique incidence, evaporated, columnar films has been studied previously only qualitatively, primarily by scanning electron microscopy. However, using atomic force microscopy and power spectral density analysis, new approaches are developed to quantify these anisotrophies in morphology in terms of their distribution functions of size, shape, spacing, and height. In addition, the biaxial stress of oblique angle columnar thin films prepared with varying angle of vapor incidence was measured by using a laser scanning method to determine changes in curvature. From this data, approaches to a quantitative model are proposed to describe the changes in morphology with varying angles of vapor incidence as related to ballistic aggregation and self-shadowing processes.

Citation Download Citation

Robert A. Knepper and Russell F. Messier "Morphology and mechanical properties of oblique angle columnar thin films", Proc. SPIE 4097, Complex Mediums, (30 June 2000); https://doi.org/10.1117/12.390588

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