Calibration tool for a CCD-camera-based vision system

Gan Xu; Siew Leng Tan; Siok Pheng Low; Yee Shuai Heng; Weng Chuen Lai; Xianhe Du

doi:10.1117/12.405815

2 November 2000 Calibration tool for a CCD-camera-based vision system

Gan Xu, Siew Leng Tan, Siok Pheng Low, Yee Shuai Heng, Weng Chuen Lai, Xianhe Du

Proceedings Volume 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries; (2000) https://doi.org/10.1117/12.405815
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

A special calibration tool has been developed for a CCD camera based vision system in an automatic assembly machine. The machine is used to attach orifice plates onto a silicon wafer in a production process. The center locations of the positioning circular holes on the plate must be controlled accurately to coincide with those on the wafer die before they are attached together by UV curing. Although CCD camera based vision systems are widely used for accurate positioning and dimensional measurements in precision engineering, electronics and semiconductor industry, their calibrations are normally done by artefacts with plane patterns. These artefacts are therefore restricted to only two dimensional measurements. The calibration tool we developed was to check the positioning accuracy of circular objects in a two-layered structure. It can also be used to determine parallax errors, non-linearity and spatial non- uniformity errors as well as repeatability of the vision system with an uncertainty at sub-micrometer level. The design, calibration and performance of the tool are described in detail in this paper.

Citation Download Citation

Gan Xu, Siew Leng Tan, Siok Pheng Low, Yee Shuai Heng, Weng Chuen Lai, and Xianhe Du "Calibration tool for a CCD-camera-based vision system", Proc. SPIE 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, (2 November 2000); https://doi.org/10.1117/12.405815

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available