Zirconium-doped indium oxide thin films for organic light-emitting diodes

Heungsoo Kim; James S. Horwitz; Gary P. Kushto; Syen B. Qadri; Zakya H. Kafafi; Douglas B. Chrisey

doi:10.1117/12.416930

2 February 2001 Zirconium-doped indium oxide thin films for organic light-emitting diodes

Heungsoo Kim, James S. Horwitz, Gary P. Kushto, Syen B. Qadri, Zakya H. Kafafi, Douglas B. Chrisey

Proceedings Volume 4105, Organic Light-Emitting Materials and Devices IV; (2001) https://doi.org/10.1117/12.416930
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

Transparent and highly conducting zirconium-doped indium oxide (ZIO) thin films have been grown by pulsed laser deposition (PLD) on glass substrates without a post- deposition anneal. The structural, electrical and optical properties of these films were investigated as a function of film composition and substrate deposition temperature. Films were deposited using a KrF excimer laser (248 nm, 30 ns FWHM) at a fluence of 1 J/cm² at growth temperatures ranging from 20 degrees Celsius to 400 degrees Celsius in oxygen pressure ranging from 1 mTorr to 25 mTorr. The films (approximately 2000 angstrom thick) deposited at 200 degrees Celsius in 25 mTorr of oxygen show electrical resistivities as low as 2.7 X 10^-4 (Omega) -cm, the average visible transmittance of 89%, the refractive index of 1.99 and optical band gap of 4.1 eV. These ZIO films were used as a transparent anode contact in organic light emitting diodes (OLEDs) and the device performance was studied. The external quantum efficiency measured at 100 A/m² for the [ZIO/TPD/Alq₃/MgAg] diodes was about 0.9%. Low driving voltage and high light emission were observed for the OLEDs with the ZIO anode.

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Heungsoo Kim, James S. Horwitz, Gary P. Kushto, Syen B. Qadri, Zakya H. Kafafi, and Douglas B. Chrisey "Zirconium-doped indium oxide thin films for organic light-emitting diodes", Proc. SPIE 4105, Organic Light-Emitting Materials and Devices IV, (2 February 2001); https://doi.org/10.1117/12.416930

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KEYWORDS

Oxygen

Organic light emitting diodes

Zirconium

Glasses

Transmittance

Refractive index

Optical properties

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