Extreme-ultraviolet source development: a comparison of different concepts

Guido Schriever; Manfred Rahe; Ulrich Rebhan; Dirk Basting; Wojciech J. Walecki; Hans Lauth; Rainer Lebert; Klaus Bergmann; Dieter Hoffmann; Oliver Rosier; Willi Neff; Reinhart Poprawe; Roland A. Sauerbrey; H. Schwoerer; S. Duesterer; C. Ziener; Peter Viktor Nickles; H. Stiehl; Ingo Will; Wolfgang Sandner; Guenther A. Schmahl; Dietbert M. Rudolph

doi:10.1117/12.406662

8 November 2000 Extreme-ultraviolet source development: a comparison of different concepts

Guido Schriever, Manfred Rahe, Ulrich Rebhan, Dirk Basting, Wojciech J. Walecki, Hans Lauth, Rainer Lebert, Klaus Bergmann, Dieter Hoffmann, Oliver Rosier, Willi Neff, Reinhart Poprawe, Roland A. Sauerbrey, H. Schwoerer, S. Duesterer, C. Ziener, Peter Viktor Nickles, H. Stiehl, Ingo Will, Wolfgang Sandner, Guenther A. Schmahl, Dietbert M. Rudolph

Author Affiliations +

Proceedings Volume 4146, Soft X-Ray and EUV Imaging Systems; (2000) https://doi.org/10.1117/12.406662
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

We discuss the results of the studies of Z-pinch sources for photolithographic applications developed by Lambda Physik. We also report the results of fundamental investigations pursued by Fraunhofer-Institut fuer Lasertechnik. Friedrich- Schiller Universitat Jena, Max-Born Institut Berlin, and Gustav August Universitat Gottingen. The later efforts are supported by German government and steered by the industrial consortium led by Lambda Physik.

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Guido Schriever, Manfred Rahe, Ulrich Rebhan, Dirk Basting, Wojciech J. Walecki, Hans Lauth, Rainer Lebert, Klaus Bergmann, Dieter Hoffmann, Oliver Rosier, Willi Neff, Reinhart Poprawe, Roland A. Sauerbrey, H. Schwoerer, S. Duesterer, C. Ziener, Peter Viktor Nickles, H. Stiehl, Ingo Will, Wolfgang Sandner, Guenther A. Schmahl, and Dietbert M. Rudolph "Extreme-ultraviolet source development: a comparison of different concepts", Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); https://doi.org/10.1117/12.406662

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