Design and fabrication of a micromechanical inverter

Kyoung-Soo Chae; Seungoh Han; Minseok Song; Sung W. Moon; James Jungho Pak

doi:10.1117/12.396471

25 August 2000 Design and fabrication of a micromechanical inverter

Kyoung-Soo Chae, Seungoh Han, Minseok Song, Sung W. Moon, James Jungho Pak

Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396471
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

A micromechanical switch, which can be used as a logic gate, is described in this paper. This switch consists of fixed input electrodes, output electrode, VCC/GND pad, and movable electrode suspended by crab-leg flexures. For mechanical switching of an electrical signal, an actuator driven by electrostatic force was used. Provided that a movable electrode is connected to VCC and a low input voltage or ground signal is applied to the fixed input electrodes and the movable electrode. The proposed micromechanical switch was fabricated by surface micromachining technology with 2 micrometers -thick poly-Si and the measured threshold voltage for ON/OFF switching was 23V.

Citation Download Citation

Kyoung-Soo Chae, Seungoh Han, Minseok Song, Sung W. Moon, and James Jungho Pak "Design and fabrication of a micromechanical inverter", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); https://doi.org/10.1117/12.396471

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available