Planarization process of BPSG: capillary vs. centrifugal/gravitational forces

Baw-Ching Perng; Kung Linliu

doi:10.1117/12.410090

23 August 2000 Planarization process of BPSG: capillary vs. centrifugal/gravitational forces

Baw-Ching Perng, Kung Linliu

Proceedings Volume 4182, Process Control and Diagnostics; (2000) https://doi.org/10.1117/12.410090
Event: Microelectronic Manufacturing, 2000, Santa Clara, CA, United States

Abstract

Film planarization process, of importance in semiconductor IC manufacturing, results from mutual competition between three forces: capillary, viscous, and gravitation. In this communication we compare, using simple geometric arguments, the order of magnitudes between the capillary force and a generalized centrifugal/gravitational force acting perpendicular to the surface. For patterns of sub-micron dimension and conditions similar to BPSG reflow and photo-resist coating we found that, within instrumental accessibility, the centrifugal term is much smaller than the capillary term. We conclude that the centrifugal/gravitational forces affect global patterns, i.e., with dimension larger than 1000 micrometers , while the capillary force dominates the sub-micro leveling process.

Citation Download Citation

Baw-Ching Perng and Kung Linliu "Planarization process of BPSG: capillary vs. centrifugal/gravitational forces", Proc. SPIE 4182, Process Control and Diagnostics, (23 August 2000); https://doi.org/10.1117/12.410090

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