Microgripper using an ICPF actuator

Tongyu Wang; Huilin Jiang

doi:10.1117/12.401768

5 October 2000 Microgripper using an ICPF actuator

Tongyu Wang, Huilin Jiang

Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401768
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

In this paper, a new prototype model of microgripper using an ICPF actuator as the servo actuator is proposed. The ICPF actuator is made form the film of perfluorosulfonic acid polymer, chemically plated on both sides with platinum. This paper describes the new structure, the motion mechanism and characteristic measurement of a microgripper using an ICPF actuator.

Citation Download Citation

Tongyu Wang and Huilin Jiang "Microgripper using an ICPF actuator", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); https://doi.org/10.1117/12.401768

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