Interferometric microscopy with ultrahigh resolution in three-dimensional imaging

Guiying Wang; Zhizhan Xu

doi:10.1117/12.403928

11 October 2000 Interferometric microscopy with ultrahigh resolution in three-dimensional imaging

Guiying Wang, Zhizhan Xu

Proceedings Volume 4224, Biomedical Photonics and Optoelectronic Imaging; (2000) https://doi.org/10.1117/12.403928
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

Three techniques for processing interference fringes were described in this paper. The first one is a phase-shifting fringe processing technique with intelligence control. The second is an inverse filtering technique to the fringe processing, and the third kind is a correlation numerical processing technique. The three processing fringe techniques are based on Mirau interferometric microscope.

Citation Download Citation

Guiying Wang and Zhizhan Xu "Interferometric microscopy with ultrahigh resolution in three-dimensional imaging", Proc. SPIE 4224, Biomedical Photonics and Optoelectronic Imaging, (11 October 2000); https://doi.org/10.1117/12.403928

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