New design concept for vibrating microgyroscope

V. J. Logeeswaran; David C.K. Ng; Francis E.H. Tay

doi:10.1117/12.404892

20 October 2000 New design concept for vibrating microgyroscope

V. J. Logeeswaran, David C.K. Ng, Francis E.H. Tay

Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404892
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

The principles of dynamic vibration absorbers or shock absorbers are used in a novel way to provide magnification rather than to suppress the unwanted vibration amplitude. The dynamic vibration magnifier (DVM) can be realized as a multi-degree freedom of systems or simply just two degrees of freedom system. The concept of DVM can be applied in the field of microelectromechanical systems, particularly in resonating microsensors for example resonating microgyroscope, micropump and microbridges. These sensors and other micromechanical resonating structures require large displacement or vibration amplitude for improving their working range or sensitivity and hence the DVM can provide an excellent method of magnification. The concept presented in this paper is two-fold; the DVM method can be used as an actuator as well as a sensor.

Citation Download Citation

V. J. Logeeswaran, David C.K. Ng, and Francis E.H. Tay "New design concept for vibrating microgyroscope", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404892

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available