Paper
6 April 2001 Materials surface topography and composition imaging using dynamic atomic force microscopy
Author Affiliations +
Proceedings Volume 4234, Smart Materials; (2001) https://doi.org/10.1117/12.424416
Event: Smart Materials and MEMS, 2000, Melbourne, Australia
Abstract
A new technique has been developed to probe the surface microtopography an the viscoelastic properties with the nanometric resolution using the vibrating modes of Scanning Probe Microscopy. Weak cantilevers, although having good force sensitivity, have found limited use for investigating of material's nanomechanical properties by conventional force modulation and intermittent contact atomic force microscopy. This is due to low forces and indentations that these cantilevers are able to exert on the surface and high amplitudes needed to overcome adhesion to the surface. Here it is shown that by employing electrostatic forcing of cantilever the imaging of local elastic properties of surface and subsurface layers can be carried out. Also, by mechanically exciting the higher vibration modes in contact or intermittent contact with the surface and monitoring the phase of vibrations, the contrast due to local surface elasticity together with surface microtopography is obtained.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Valentinas J. Snitka, Vida Mizariene, and Arturas Ulcinas "Materials surface topography and composition imaging using dynamic atomic force microscopy", Proc. SPIE 4234, Smart Materials, (6 April 2001); https://doi.org/10.1117/12.424416
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KEYWORDS
Atomic force microscopy

Scanning probe microscopy

Modulation

Microscopes

Phase shift keying

Phase shifts

Silicon

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