F2 lasers: high-resolution optical processing system for shaping photonic components

Peter R. Herman; Kevin P. Chen; Xiaoli Midori Wei; Jie Zhang; Juergen Ihlemann; Dirk Schaefer; Gerd Marowsky; Peter Oesterlin; Berthold Burghardt

doi:10.1117/12.432547

29 June 2001 F₂ lasers: high-resolution optical processing system for shaping photonic components

Peter R. Herman, Kevin P. Chen, Xiaoli Midori Wei, Jie Zhang, Juergen Ihlemann, Dirk Schaefer, Gerd Marowsky, Peter Oesterlin, Berthold Burghardt

Author Affiliations +

Proceedings Volume 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI; (2001) https://doi.org/10.1117/12.432547
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

A high-resolution 157-nm optical system has been developed for the first time to microprocess optical materials with record short-wavelength F₂-laser radiation. The F₂-laser photons drive strong material interactions in silica glasses for microsculpting surfaces and for imprinting internal refractive index structures. The high-resolution optics deliver a homogenized beam of high on-target fluence (approximately 2.5 J/cm²) for ablation of fused silica and other wide bandgap optical materials. The system resolution is approaching 1-micron lateral and less than 100-nm depth - sub-wavelength features appropriate for defining optical communication components at 1.55-micrometers wavelength. This paper describes this novel processing system and offers prospects for F₂-laser microfabrication and trimming of photonic components in the telecommunication and general optics manufacturing fields.

Citation Download Citation

Peter R. Herman, Kevin P. Chen, Xiaoli Midori Wei, Jie Zhang, Juergen Ihlemann, Dirk Schaefer, Gerd Marowsky, Peter Oesterlin, and Berthold Burghardt "F₂ lasers: high-resolution optical processing system for shaping photonic components", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); https://doi.org/10.1117/12.432547

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