Field-test results of an image retrieval system for semiconductor yield learning

Thomas P. Karnowski; Kenneth W. Tobin Jr.; Lloyd F. Arrowood; Regina K. Ferrell; James S. Goddard Jr.; Fred Lakhani

doi:10.1117/12.429362

5 June 2001 Field-test results of an image retrieval system for semiconductor yield learning

Thomas P. Karnowski, Kenneth W. Tobin Jr., Lloyd F. Arrowood, Regina K. Ferrell, James S. Goddard Jr., Fred Lakhani

Proceedings Volume 4275, Metrology-based Control for Micro-Manufacturing; (2001) https://doi.org/10.1117/12.429362
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

Images of semiconductor defects are maintained in semiconductor yield management systems to diagnose problems that arise during the manufacturing process. A semiconductor-specific content-based image retrieval system was developed by Oak Ridge National Laboratory under the auspices of International SEMATECH (ISMT) during 1998 - 1999. The system uses commercial databases to store image information and uses a customized indexing technology to rapidly retrieve similar images. Additional defect information (position, wafer ID, lot, etc) has now been incorporated into the system through the use of additional database tables. During Fall 2000, the system was deployed in two ISMT member company fabs to demonstrate the utility of this approach in managing large databases of images and to show causal relationships between image appearance and wafer information such as processing layer, wafer lot, analysis dates, etc. This paper summarizes the results of these field tests and shows the utility of this approach through data analysis conducted on approximately one month of historical defect data.

Citation Download Citation

Thomas P. Karnowski, Kenneth W. Tobin Jr., Lloyd F. Arrowood, Regina K. Ferrell, James S. Goddard Jr., and Fred Lakhani "Field-test results of an image retrieval system for semiconductor yield learning", Proc. SPIE 4275, Metrology-based Control for Micro-Manufacturing, (5 June 2001); https://doi.org/10.1117/12.429362

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available