1-J and 300-W excimer laser with exceptional pulse stability for poly-Si crystallization

Michael Fiebig; Uwe Stamm; Peter Oesterlin; Naoyuki Kobayashi; Burkhard Fechner

doi:10.1117/12.424885

30 April 2001 1-J and 300-W excimer laser with exceptional pulse stability for poly-Si crystallization

Michael Fiebig, Uwe Stamm, Peter Oesterlin, Naoyuki Kobayashi, Burkhard Fechner

Proceedings Volume 4295, Flat Panel Display Technology and Display Metrology II; (2001) https://doi.org/10.1117/12.424885
Event: Photonics West 2001 - Electronic Imaging, 2001, San Jose, CA, United States

Abstract

Liquid-crystal displays (LCDs) especially active-matrix LCDs are conquering the display market. The market has forced a continuous process development to fulfill all of the demands from the various fields like car navigation systems, multi- media applications, laptop computers or PC displays. The LCD manufacturers face a constant challenge to produce higher performance display at lower costs. Therefore, they are looking for the most cost effective and best production technique.

Citation Download Citation

Michael Fiebig, Uwe Stamm, Peter Oesterlin, Naoyuki Kobayashi, and Burkhard Fechner "1-J and 300-W excimer laser with exceptional pulse stability for poly-Si crystallization", Proc. SPIE 4295, Flat Panel Display Technology and Display Metrology II, (30 April 2001); https://doi.org/10.1117/12.424885

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