Infrared transparent conductive oxides

Linda F. Johnson; Mark B. Moran

doi:10.1117/12.439187

7 September 2001 Infrared transparent conductive oxides

Linda F. Johnson, Mark B. Moran

Proceedings Volume 4375, Window and Dome Technologies and Materials VII; (2001) https://doi.org/10.1117/12.439187
Event: Aerospace/Defense Sensing, Simulation, and Controls, 2001, Orlando, FL, United States

Abstract

A novel class of complex metal oxides that have potential as transparent conducting oxides (TCOs) for the electromagnetic-interference (EMI) shielding on IR-seeker windows and missile domes has been identified. These complex metal oxides exhibit the rhombohedral (R3m) crystalline structure of naturally occurring delafossite, CuFeO₂. The general chemical formula is ABO₂ where A is a monovalent metal (Me⁺¹ such as Cu, Ag, Au, Pt or Pd, and B is a trivalent metal (Me³⁺) such as Al,Ti,Cr,Co,Fe,Ni,Cs,Rh,Ga,Sn,In,Y,La,Pr,Nd,Sm or Eu. By adjusting the oxygen content, the conductivity can be varied over a wide range so that the delafossites behave as insulators, semiconductors or metals. This paper presents results for films of p-type Cu_xAl_yO_z and n-type Cu_xCr_yO_z deposited by reactive magnetron co-sputtering from high-purity-metal targets. Films have been deposited using conventional RF- and DC-power supplies, and a new asymmetric-bipolar-pulsed- DC-power supply. Similar to the high-temperature-copper- oxide superconductors, the presence of Cu-O bonds is critical for the unique properties. Fourier transform infrared (FTIR) and electron spectroscopy for chemical analysis (ESCA) are used to understand the relationship between the optoelectornic properties and the molecular structure of the films. For example, FTIR absorption bands at 1470 and 1395cm^-1 are present only in Cu_xAl_yO_z films that exhibit enhanced electrical conductivity. When these bands are absent, the Cu_xAl_yO_z films have high values of resistivity. In addition to the 1470 and 1395cm^-1 bands observed in Cu_xAl_yO_z films, another pair of bands at 1040 and 970cm^-1 is present in Cu_xCr_yO_z films.

Citation Download Citation

Linda F. Johnson and Mark B. Moran "Infrared transparent conductive oxides", Proc. SPIE 4375, Window and Dome Technologies and Materials VII, (7 September 2001); https://doi.org/10.1117/12.439187

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