Paper
30 April 2001 Transport in a deformable microchannel flow
W. Kwang-Hua Chu, Jing Fang
Author Affiliations +
Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425329
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom
Abstract
Investigation of the entrainment of fluids induced by a wavy deformation along walls in a confined falt-plane microchannel is conducted by using the relaxed Navier-Stokes model with velocity- slip boundary conditions. Both no-slip and slip flow cases are presented with the former ones matched with the previous results. Flow patterns tuned by critical reflux values a0 and Reynolds number are demonstrated especially for the free pumping case. a0 decreases due to slip-flow effects after we compared them with no-slip cases.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
W. Kwang-Hua Chu and Jing Fang "Transport in a deformable microchannel flow", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425329
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KEYWORDS
Microelectromechanical systems

Gases

Silicon

Microfluidics

Semiconducting wafers

Adaptive optics

Etching

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