Aspheric metrology with a Shack-Hartmann wavefront sensor

John E. Greivenkamp; Daniel G. Smith; Robert O. Gappinger; Gregory A. Williby

doi:10.1117/12.437221

14 August 2001 Aspheric metrology with a Shack-Hartmann wavefront sensor

John E. Greivenkamp, Daniel G. Smith, Robert O. Gappinger, Gregory A. Williby

Proceedings Volume 4419, 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications; (2001) https://doi.org/10.1117/12.437221
Event: IV Iberoamerican Meeting of Optics and the VII Latin American Meeting of Optics, Lasers and Their Applications, 2001, Tandil, Argentina

Abstract

The basic problem associated with aspheric testing without the use of null optics is to obtain increased measurement range while maintaining the required measurement accuracy. Typically, the introduction of a custom-designed and fabricated null corrector has allowed the problem of aspheric testing to be reduced to that of spherical testing. Shack-Hartmann wavefront sensor have been sued for adaptive optics, but have seen little application in optical metrology. We will discus the use of a Shack-Hartmann wavefront sensor as a means of directly testing wavefronts with large aspheric departures. The Shack-Hartmann sensor provides interesting tradeoffs between measurement range, accuracy and spatial resolution. We will discus the advantages and disadvantages of the Shack-Hartmann wavefront sensor over more conventional metrology tests. The implementation of a Shack-Hartmann wavefront sensor for aspheric testing will be shown.

Citation Download Citation

John E. Greivenkamp, Daniel G. Smith, Robert O. Gappinger, and Gregory A. Williby "Aspheric metrology with a Shack-Hartmann wavefront sensor", Proc. SPIE 4419, 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications, (14 August 2001); https://doi.org/10.1117/12.437221

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