Quasi-confocal extended field surface sensing

Joseph Cohen-Sabban; Jerome Gaillard-Groleas; Pierre-Jean Crepin

doi:10.1117/12.450093

10 December 2001 Quasi-confocal extended field surface sensing

Joseph Cohen-Sabban, Jerome Gaillard-Groleas, Pierre-Jean Crepin

Proceedings Volume 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II; (2001) https://doi.org/10.1117/12.450093
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

A novel optoelectronic setup based on a quasi confocal, z- axis extended field, proprietary design has been developed for High Resolution Non Contact 3D Surface Metrology including roughness characterization and surface flaw detection.

Citation Download Citation

Joseph Cohen-Sabban, Jerome Gaillard-Groleas, and Pierre-Jean Crepin "Quasi-confocal extended field surface sensing", Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); https://doi.org/10.1117/12.450093

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