Paper
2 November 2001 Surface cleaning and etching of rare-earth-doped phosphate glass
Amy Suzanne Barnes, Carlo G. Pantano, Samuel D. Conzone
Author Affiliations +
Abstract
The surface reactions of phosphate glasses are important for the processing and application of photonic devices, biomedical materials and conventional optical components. Of particular concern are the leaching of optically-active dopant species, surface layer formation and roughening during polishing, cleaning and other fabrication processes. In this study, the effects of various cleaning treatments, and both acid and base etching, were evaluated using surface analytical techniques (XPS, AFM). It is shown that in these phosphate glasses, the aluminum and rare-earth oxides have limited aqueous solubility, whereas the phosphate network is soluble over a wider range of pH. Thus, under those conditions where polishing damage can be removed by etching the surface, a localized precipitation of rare-earth oxides occurs which influences the final roughness and surface composition. Conversely, under conditions where this precipitation can be eliminated, an in-depth leaching of the surface occurs. These aqueous surface reactions were similar for both the optically-active and passive IOG-1 glasses. An optimized surface preparation method is described.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Amy Suzanne Barnes, Carlo G. Pantano, and Samuel D. Conzone "Surface cleaning and etching of rare-earth-doped phosphate glass", Proc. SPIE 4452, Inorganic Optical Materials III, (2 November 2001); https://doi.org/10.1117/12.446886
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Glasses

Etching

Surface finishing

Lanthanum

Sodium

Aluminum

Polishing

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