Free-space monolithic microoptical modules: a low-cost route for photonic interconnects to silicon

Hugo Thienpont; Valerie Baukens; Heidi Ottevaere; Bart Volckaerts; Patrik Tuteleers; Pedro Vynck; Michael Vervaeke; Christof Debaes; Guy Verschaffelt; Alex Hermanne; Irina P. Veretennicoff

doi:10.1117/12.450444

13 December 2001 Free-space monolithic microoptical modules: a low-cost route for photonic interconnects to silicon

Hugo Thienpont, Valerie Baukens, Heidi Ottevaere, Bart Volckaerts, Patrik Tuteleers, Pedro Vynck, Michael Vervaeke, Christof Debaes, Guy Verschaffelt, Alex Hermanne, Irina P. Veretennicoff

Author Affiliations +

Proceedings Volume 4455, Micro- and Nano-optics for Optical Interconnection and Information Processing; (2001) https://doi.org/10.1117/12.450444
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

We report on the design, the fabrication, the characterization and the demonstration of scalable multi-channel free-space interconnection components with the potential for Tb/s.cm² aggregate bit rate capacity over inter-chip interconnection distances. The demonstrator components are fabricated in a high quality optical plastic, PMMA, using an ion-based rapid prototyping technology that we call deep proton lithography. With the presently achieved Gigabit/s data rates for each of the individual 16 channels with a BER smaller than 10(superscript -13 and with inter-channel cross-talk lower than -22dB the module aims at optically interconnecting 2-D opto-electronic VCSEL and receiver arrays, flip-chip mounted on CMOS circuitry. Furthermore, using ray-tracing software and radiometric simulation tools, we perform a sensitivity analysis for misalignment and fabrication errors on these plastic micro-optical modules and we study industrial fabrication and material issues related to the mass-replication of these components through injection-molding techniques. Finally we provide evidence that these components can be mass-fabricated in dedicated, highly-advanced optical plastics at low cost and with the required precision.

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Hugo Thienpont, Valerie Baukens, Heidi Ottevaere, Bart Volckaerts, Patrik Tuteleers, Pedro Vynck, Michael Vervaeke, Christof Debaes, Guy Verschaffelt, Alex Hermanne, and Irina P. Veretennicoff "Free-space monolithic microoptical modules: a low-cost route for photonic interconnects to silicon", Proc. SPIE 4455, Micro- and Nano-optics for Optical Interconnection and Information Processing, (13 December 2001); https://doi.org/10.1117/12.450444

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