Deformable mirrors for high-power lasers

Supriyo Sinha; Justin D. Mansell; Robert L. Byer

doi:10.1117/12.454728

1 February 2002 Deformable mirrors for high-power lasers

Supriyo Sinha, Justin D. Mansell, Robert L. Byer

Proceedings Volume 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III; (2002) https://doi.org/10.1117/12.454728
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

We describe the performance of a bulk micromachined deformable mirror coated with a dielectric stack for adaptive optics applications with high power lasers. A reflectance of greater than 99.9% was measured and the mirror had a residual static aberration of less than 90 nm rms primarily in astigmatism. A thermally induced distortion of 71 nm RMS was observed for an incident intensity of 300 W/cm² and an average power of 57 W. The multi-layer coated deformable mirror survived over half a billion cycles without degradation and survived for 30 hours with 36 W cw 1064 nm laser light. In addition, the thermally induced distortion with 22 W of average laser power (350 W/cm²) was reduced from 88 nm to 31 nm rms.

Citation Download Citation

Supriyo Sinha, Justin D. Mansell, and Robert L. Byer "Deformable mirrors for high-power lasers", Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); https://doi.org/10.1117/12.454728

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