PSF measurement of imaging detectors with an x-ray microbeam

Hidekazu Takano; Yoshio Suzuki; Kentaro Uesugi; Akihisa Takeuchi; Naoto Yagi

doi:10.1117/12.450230

13 December 2001 PSF measurement of imaging detectors with an x-ray microbeam

Hidekazu Takano, Yoshio Suzuki, Kentaro Uesugi, Akihisa Takeuchi, Naoto Yagi

Proceedings Volume 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II; (2001) https://doi.org/10.1117/12.450230
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Point spread functions (PSF) of some kinds of x-ray imaging detectors are directly measured using x-ray microbeam. The experiment has been performed at bending magnet beamline BL20B2 and undulator beamline BL2oXU of Spring-9. The microbeam is focused using a Fresnel zone plate (FZP) with coherent illumination to 0.3micrometers (almost outermost zone width of the FZP). The imaging detectors are put at the focal plane and directly detect the microbeam. Two types of high spatial resolving detectors are tested. One is x-ray- electron conversion type with electro-magnetic lens, and spatial resolution is estimated to 0.7micrometers . The other is x-ray-visible light conversion type with optical lens and the spatial resolution is estimated to 1.0micrometers .

Citation Download Citation

Hidekazu Takano, Yoshio Suzuki, Kentaro Uesugi, Akihisa Takeuchi, and Naoto Yagi "PSF measurement of imaging detectors with an x-ray microbeam", Proc. SPIE 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II, (13 December 2001); https://doi.org/10.1117/12.450230

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