Laser micromachining for manufacturing MEMS devices

Malcolm C. Gower

doi:10.1117/12.443040

1 October 2001 Laser micromachining for manufacturing MEMS devices

Malcolm C. Gower

Proceedings Volume 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication; (2001) https://doi.org/10.1117/12.443040
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Applications of laser micromachining to the manufacture and prototyping of MEMS and MOEMS devices are presented. Examples of microturbines, biofactory on a chip, microfluidic components and microoptical elements manufactured by laser micromachining are described.

Citation Download Citation

Malcolm C. Gower "Laser micromachining for manufacturing MEMS devices", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); https://doi.org/10.1117/12.443040

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