Optical performance of pivoting micromirrors

Olga Blum Spahn; Ernest J. Garcia; Victor C. Esch; Grant D. Grossetete; Fernando Bitsie; Sita S. Mani; Jerome F. Jakubczak

doi:10.1117/12.443097

2 October 2001 Optical performance of pivoting micromirrors

Olga Blum Spahn, Ernest J. Garcia, Victor C. Esch, Grant D. Grossetete, Fernando Bitsie, Sita S. Mani, Jerome F. Jakubczak

Author Affiliations +

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443097
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

In this paper we describe optical and dynamic performance of tip/tilt micromachined mirrors fabricated using the SUMMIT V surface micromachining process. We find that the tilt angle for a given mirror design is determined by a combination of geometric factors and stiffness of the capacitive suspension. Switching speeds of ~40-50 microsecond(s) econds are measured for 50 micrometers -square mirrors. Finally surface roughness and curvature before and after metallization are obtained using white light interferometry.

Citation Download Citation

Olga Blum Spahn, Ernest J. Garcia, Victor C. Esch, Grant D. Grossetete, Fernando Bitsie, Sita S. Mani, and Jerome F. Jakubczak "Optical performance of pivoting micromirrors", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443097

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