Integrated MMI optical couplers and optical switches in silicon-on-insulator technology

Jinzhong Yu; Hongzhen Wei; Xiaofeng Zhang; Qingfeng Yan; Jinsong Xia

doi:10.1117/12.445077

18 October 2001 Integrated MMI optical couplers and optical switches in silicon-on-insulator technology

Jinzhong Yu, Hongzhen Wei, Xiaofeng Zhang, Qingfeng Yan, Jinsong Xia

Proceedings Volume 4582, Optical Switching and Optical Interconnection; (2001) https://doi.org/10.1117/12.445077
Event: Asia-Pacific Optical and Wireless Communications Conference and Exhibit, 2001, Beijing, China

Abstract

Integrated multimode interference coupler based on silicon-on- insulator has been become a kind of more and more attractive device in optical systems. Thin cladding layers (< 1.0 micrometers ) can be used in SOI waveguide due to the large index step between Si and SiO₂, making them compatible with the VLSI technology. Here we demonstrate the design and fabrication of multimode interference (MMI) optical couplers and optical switches in SOI technology.

Citation Download Citation

Jinzhong Yu, Hongzhen Wei, Xiaofeng Zhang, Qingfeng Yan, and Jinsong Xia "Integrated MMI optical couplers and optical switches in silicon-on-insulator technology", Proc. SPIE 4582, Optical Switching and Optical Interconnection, (18 October 2001); https://doi.org/10.1117/12.445077

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