Depth-scanning fringe projection: a new technique for absolute phase evaluation

Robert Windecker; Klaus Koerner; Hans J. Tiziani

doi:10.1117/12.447368

30 October 2001 Depth-scanning fringe projection: a new technique for absolute phase evaluation

Robert Windecker, Klaus Koerner, Hans J. Tiziani

Proceedings Volume 4596, Advanced Photonic Sensors and Applications II; (2001) https://doi.org/10.1117/12.447368
Event: International Symposium on Photonics and Applications, 2001, Singapore, Singapore

Abstract

Fringe projection is an often used optical technique for 3-D surface measurements of industrial and biological objects. Classical fringe projection has the disadvantage to determine the surface topgraphy in a quite small unambiguity range only. Gray code techniques are used to solve this problem, but the spatial resolution is reduced due to a small numerical aperture. In a new approach we want to extend the measurement range and we will increase the spatial and the vertical resolution too. This is achieved by a depth-scanning approach together with high numerical apertures for the illumination as well as for the detection. With the aid of an additional z-scanning stage either the object, the sensor, or the image plan are scanned to obtain data over the whole measurement volume. We call this technique depth-scanning fringe projection. It is especially advantageous for the measurement of medium sized objects and can achieve resolutions of less than 0.2micrometers .

Citation Download Citation

Robert Windecker, Klaus Koerner, and Hans J. Tiziani "Depth-scanning fringe projection: a new technique for absolute phase evaluation", Proc. SPIE 4596, Advanced Photonic Sensors and Applications II, (30 October 2001); https://doi.org/10.1117/12.447368

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KEYWORDS

Data acquisition

Interferometry

Modulation

Sensors

Signal detection

Microscopes

Phase shift keying

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