Tunable F-P optical filter based on microcavity structure

Min Chen; Xu Liu; Haifeng Li

doi:10.1117/12.444670

15 October 2001 Tunable F-P optical filter based on microcavity structure

Min Chen, Xu Liu, Haifeng Li

Proceedings Volume 4600, Advances in Microelectronic Device Technology; (2001) https://doi.org/10.1117/12.444670
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

F-P optical thin film filter based on glass was designed and built using thin film coating and RIE technology. Photoresist was the sacrificial layer and later was removed by dry etching.

Citation Download Citation

Min Chen, Xu Liu, and Haifeng Li "Tunable F-P optical filter based on microcavity structure", Proc. SPIE 4600, Advances in Microelectronic Device Technology, (15 October 2001); https://doi.org/10.1117/12.444670

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