Deflecting-fiber-type MEMS variable optical attenuator

Maosong Wu; Chunsheng Yang; Xinhui Mao; Xiaolin Zhao; Bingchu Cai

doi:10.1117/12.444583

11 October 2001 Deflecting-fiber-type MEMS variable optical attenuator

Maosong Wu, Chunsheng Yang, Xinhui Mao, Xiaolin Zhao, Bingchu Cai

Proceedings Volume 4604, Fiber Optic Components, Subsystems, and Systems for Telecommunications; (2001) https://doi.org/10.1117/12.444583
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

This paper proposes and demonstrates a novel MEMS variable optical attenuator whose attenuation mechanism is completely different from those in literature. The basic operation principle is that the optical power coupled between two initially aligned single mode fibers will be continuously attenuated while the end of one of the fibers is deflected from the initial position. A micromachined solenoid type inductor with a U-shaped permalloy magnetic core is used to attract the deflectable fiber that has a permalloy coat on its end part. To fabricate the multi-layer three-dimensional inductive component, a new UV-LIGA lithography process for thick photoresists is developed combining advantages of both SU-8 and AZ-4000 photoresists. Micro electroplating techniques are also used to produce the copper coil and permalloy core. The inductive component is approximately 1.7mm x 1.3mm x 50μm large and has a low resistance value (2.1 Ω). The whole size of the VOA before packaging is 30mm x 2mm x 0.6mm. The first prototype shows less then 3-dB insertion loss at 0-dB attenuation and nearly 40dB attenuation range with less then 20mw electrical input power at 1550nm.

Citation Download Citation

Maosong Wu, Chunsheng Yang, Xinhui Mao, Xiaolin Zhao, and Bingchu Cai "Deflecting-fiber-type MEMS variable optical attenuator", Proc. SPIE 4604, Fiber Optic Components, Subsystems, and Systems for Telecommunications, (11 October 2001); https://doi.org/10.1117/12.444583

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