Paper
7 June 2002 Using the Grating Light Valve device as a multichannel variable optical attenuator (VOA) for the 1.55-μm spectral region
Christopher S. Gudeman, Clinton B. Carlisle, James Hunter, Robert W. Corrigan, Robert J. Monteverde, Jahja I. Trisnadi
Author Affiliations +
Abstract
The Grating Light ValveTM (GLVtm) spatial light modulator is a unique and proven CMOS process-compatible optical MEMS device. The modulator employs a dynamically adjustable diffraction grating to manipulate an optical signal. Today, the GLVTM technology is successfully used in high-resolution display and imaging systems, where its high efficiency, large dynamic range, precise analog attenuation, fast switching speed, high reliability, high yield, and the ability to integrate thousands of channels into a single device are fundamental advantages. These same properties make the GLVTM device desirable for optical telecommunication applications. The optical properties, functionality, device design, and CMOS processing of the GLVTM will be presented. Challenges and solutions that arise from adapting the current GLVTM technology to optical telecommunications wavelengths will be discussed. Measured results will be presented that describe GLVTM performance parameters, including insertion loss, dynamic range, polarization dependent loss, and spectral attenuation accuracy.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christopher S. Gudeman, Clinton B. Carlisle, James Hunter, Robert W. Corrigan, Robert J. Monteverde, and Jahja I. Trisnadi "Using the Grating Light Valve device as a multichannel variable optical attenuator (VOA) for the 1.55-μm spectral region", Proc. SPIE 4653, WDM and Photonic Switching Devices for Network Applications III, (7 June 2002); https://doi.org/10.1117/12.469634
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Cited by 4 scholarly publications.
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KEYWORDS
Signal attenuation

Optical communications

Electrodes

Polarization

Microelectromechanical systems

Diffraction

Grating light valves

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