Fabrication of three-dimensional photonic crystals by femtosecond laser interference

Shigeki Matsuo; Toshiaki Kondo; Saulius Juodkazis; Vygantas Mizeikis; Hiroaki Misawa

doi:10.1117/12.463891

25 April 2002 Fabrication of three-dimensional photonic crystals by femtosecond laser interference

Shigeki Matsuo, Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, Hiroaki Misawa

Proceedings Volume 4655, Photonic Bandgap Materials and Devices; (2002) https://doi.org/10.1117/12.463891
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States

Abstract

We describe a novel microfabrication method based on interference of several coherent laser pulses in photosensitive media. The method allows to transform the periodic multidimensional interference patterns into periodic modulation of dielectric properties of the material, and is therefore potentially suitable for the photonic crystal fabrication in materials like photoresists, photosensitive glasses, and others. We have fabricated one, two, an three-dimensional photonic crystals with different lattices and sub-micrometer periods. The fabricated structures have high structural quality, as evidenced by confocal and scanning electron microscopes. Furthermore, using numerical simulations we explore the possibilities to obtain body-centered-cubic and diamond photonic crystal lattices by varying optical phases of the interfering beams. Numerical simulations are also used to reveal photonic bandgap properties of some 2D photonic crystals, fabricated using this technique.

Citation Download Citation

Shigeki Matsuo, Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, and Hiroaki Misawa "Fabrication of three-dimensional photonic crystals by femtosecond laser interference", Proc. SPIE 4655, Photonic Bandgap Materials and Devices, (25 April 2002); https://doi.org/10.1117/12.463891

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