DUV optical metrology for the 90-nm node, CD linearity, contacts, and corner rounding

Louis M. Chacon; Nicholas G. Doe; Richard D. Eandi; Patrick St. Cin

doi:10.1117/12.473474

16 July 2002 DUV optical metrology for the 90-nm node, CD linearity, contacts, and corner rounding

Louis M. Chacon, Nicholas G. Doe, Richard D. Eandi, Patrick St. Cin

Proceedings Volume 4689, Metrology, Inspection, and Process Control for Microlithography XVI; (2002) https://doi.org/10.1117/12.473474
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

Many techniques are used to reduce k1 for the 90nm node, including phase shift masks (PSM), assist features and optical proximity correction (OPC) features. Today, in addition to CD line widths, critical measurements of assist features, contact areas, and corner rounding, are now required to verify reticle integrity. New algorithms have been developed and implemented on the KMS100 DUV optical metrology tool to correct for iso/dense bias (optical proximity correction), assess corner rounding effects, and verify contact fidelity and printability. This paper presents new CD metrology studies for Chrome-on-Glass (COG) performed on a KMS100 DUV optical tool using these new metrology algorithms.

Citation Download Citation

Louis M. Chacon, Nicholas G. Doe, Richard D. Eandi, and Patrick St. Cin "DUV optical metrology for the 90-nm node, CD linearity, contacts, and corner rounding", Proc. SPIE 4689, Metrology, Inspection, and Process Control for Microlithography XVI, (16 July 2002); https://doi.org/10.1117/12.473474

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