Rapid fabrication of lightweight silicon-carbide mirrors

John S. Johnson; Kevin D. Grobsky; Don Bray

doi:10.1117/12.482166

9 September 2002 Rapid fabrication of lightweight silicon-carbide mirrors

John S. Johnson, Kevin D. Grobsky, Don Bray

Proceedings Volume 4771, Optomechanical Design and Engineering 2002; (2002) https://doi.org/10.1117/12.482166
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Silicon carbide (SiC) has long been recognized as an attractive mirror material due to its superior mechanical and thermal properties when compared to conventional optical materials. However, the material properties of SiC which make the material attractive from a design standpoint have often precluded its use when low cost and rapid delivery of an optical mirror were required. This paper describes an approach that was developed by Zygo Corporation, working in conjunction with POCO Graphite Inc. for the rapid fabrication of lightweight silicon carbide optics. This approach utilizes a SiC substrate produced by POCO Graphite Inc. using a non-traditional process coupled with deterministic finishing techniques developed by Zygo. Using this approach, we are now capable of producing high quality prototype components (λ/10 PV figure, 10 Å rms. micro roughness) of SiC within a few weeks, rather than the traditional period of months. Applications include lightweight scan mirrors, stage mirrors for lithography positioning tools, as well as similar applications where high stiffness and low weight are significant performance parameters. MRF polishing results comparing SiC to conventional optical materials are also presented.

Citation Download Citation

John S. Johnson, Kevin D. Grobsky, and Don Bray "Rapid fabrication of lightweight silicon-carbide mirrors", Proc. SPIE 4771, Optomechanical Design and Engineering 2002, (9 September 2002); https://doi.org/10.1117/12.482166

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available