Polycapillary optics beam divergence

Huapeng Huang; Walter M. Gibson; Igor Yu. Ponomarev; Russell Youngman

doi:10.1117/12.450606

23 October 2002 Polycapillary optics beam divergences

Huapeng Huang, Walter M. Gibson, Igor Yu. Ponomarev, Russell Youngman

Proceedings Volume 4781, Advances in Laboratory-Based X-Ray Sources and Optics III; (2002) https://doi.org/10.1117/12.450606
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

This paper is about the beam divergences of polycapillary optics. The definitions and measurement methods of polycapillary optics beam local divergence and global divergence are given. Factors like source spot size, optic input focal distance etc. for determining the beam local divergences are analyzed. Some simulation and experimental results for the polycapillary optics, which are used for X-ray diffraction and X-ray lithography, will also be presented.

Citation Download Citation

Huapeng Huang, Walter M. Gibson, Igor Yu. Ponomarev, and Russell Youngman "Polycapillary optics beam divergences", Proc. SPIE 4781, Advances in Laboratory-Based X-Ray Sources and Optics III, (23 October 2002); https://doi.org/10.1117/12.450606

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