Novel diffractive optics for x-ray beam shaping

Enzo M. Di Fabrizio; Dan Cojoc; Stefano Cabrini; Burkhard Kaulich; Thomas Wilhein; Jean Susini

doi:10.1117/12.452287

21 November 2002 Novel diffractive optics for x-ray beam shaping

Enzo M. Di Fabrizio, Dan Cojoc, Stefano Cabrini, Burkhard Kaulich, Thomas Wilhein, Jean Susini

Proceedings Volume 4783, Design and Microfabrication of Novel X-Ray Optics; (2002) https://doi.org/10.1117/12.452287
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

In our days, there is an increased interest for extreme ultraviolet and x-ray microscopy, which is mainly due to the availability of nearly ideal optical sources for diffractive optics. Synchrotrons of the latest generation and free electron lasers (in the near future) are sources that can produce x-ray beams with low divergence, whose wavelength can be tuned over a range of several keV and whose spectrum can be monochromatised within a band pass Δλ/λ< 10^-4. In this paper we present the design, fabrication and use of novel diffractive optical elements that, beyond simple focusing, can perform new optical functions in the range of soft X-rays: multi-focusing in single or multiple focal planes and beam shaping of a generic monochromatic beam into a desired continuous geometrical pattern. The design is based on scalar diffraction approaches using iterative or direct algorithms to calculate the optical function. Diffractive optical elements with 100x100 microns size and 100 nanometers resolution have been fabricated using e-beam lithography and their optical functions have been tested in differential interference contrast microscopy. We suggest their use also in mask-less lithography and chemical vapor deposition induced by extreme ultraviolet and x-ray radiation.

Citation Download Citation

Enzo M. Di Fabrizio, Dan Cojoc, Stefano Cabrini, Burkhard Kaulich, Thomas Wilhein, and Jean Susini "Novel diffractive optics for x-ray beam shaping", Proc. SPIE 4783, Design and Microfabrication of Novel X-Ray Optics, (21 November 2002); https://doi.org/10.1117/12.452287

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available