Scanning laser Doppler vibrometer for dynamic measurements on small- and microsystems

Paolo Castellini; Barbara Marchetti; Enrico Primo Tomasini

doi:10.1117/12.468137

22 May 2002 Scanning laser Doppler vibrometer for dynamic measurements on small- and microsystems

Paolo Castellini, Barbara Marchetti, Enrico Primo Tomasini

Proceedings Volume 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (2002) https://doi.org/10.1117/12.468137
Event: Fifth International Conference on Vibration Measurements by Laser Techniques, 2002, Ancona, Italy

Abstract

In the present work the development of a customised vibrometer able to work on Microsystems is shown. The system is based on a commercial Laser Doppler vibrometer, in which the optical set-up, the mechanical arrangement and the processing software and hardware were modified and developed to measure vibrations of small object with a resolution in the micro scale. The main characteristics of this system is a very versatile platform, in which laser Doppler Vibrometry, two-axis stages micropositioner, digital signal processing and image acquisition and processing can work together in order to obtain the integration of vibration measurements with other experimental techniques. The system developed, which represents the first step in this project, has been applied to a typical test case in order to verify performances and limits. A discussion about main features and limits is presented.

Citation Download Citation

Paolo Castellini, Barbara Marchetti, and Enrico Primo Tomasini "Scanning laser Doppler vibrometer for dynamic measurements on small- and microsystems", Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); https://doi.org/10.1117/12.468137

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