Shack-Hartmann wavefront sensor for optical metrology

Bo Qi; Hongbin Chen

doi:10.1117/12.530340

19 November 2003 Shack-Hartmann wavefront sensor for optical metrology

Bo Qi, Hongbin Chen

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.530340
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

A new type of Shack-Hartmann wavefront sensor (SHWS) for optical metrology using digital still camera and a personal computer is designed. There has not expensive image-grabber hardware in this system. We can control image format of storing with this method. In order not to lose information of wavefront, uncompressing image format was selected in our SHWS. We also describe the wavefront reconstruction algorithm in Shack-Hartmann wavefront analyzing software (SHWAS).

Citation Download Citation

Bo Qi and Hongbin Chen "Shack-Hartmann wavefront sensor for optical metrology", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.530340

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