Laser ablation plume of FeSi2 alloy target studied by TOF mass and optical emission spectroscopies

Aiko Narazaki; Tadatake Sato; Yoshizo Kawaguchi; Hiroyuki Niino

doi:10.1117/12.486562

19 February 2003 Laser ablation plume of FeSi₂ alloy target studied by TOF mass and optical emission spectroscopies

Aiko Narazaki, Tadatake Sato, Yoshizo Kawaguchi, Hiroyuki Niino

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486562
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

Time-of-flight (TOF) mass and optical emission spectroscopies have been performed on the ablation plume from α-FeSi₂ alloy target under KrF excimer laser irradiation at a fluence of 0.35-2.5J/cm² to characterize the mass, kinetic energies and excited states of the ejected species. According to the TOF mass measurements in vacuum, the most prominent species were Si and Fe atoms and ions over the entire fluence range, in addition to Si dimer. At 0.4-0.7 J/cm², only neutrals of Si, Fe and Si₂ with the kinetic energy of around 0.2eV were observed. At the fluences above 0.7J/cm², doubly and singly charged Si and Fe ions appeared abruptly increased their number density and kinetic energies from 6 eV at 0.7 J/cm² to over 100 eV at 2.5 J/cm². Consistent with the TOF mass spectra, the optical emission lines stemmed from the monatomic Si and Fe as well as Si dimer in the wavelength range of 240-800 nm in vacuum. On the other hand, we confirmed some luminescent lines appeared only in helium atmosphere of 10 Torr, suggesting the cluster formation such as FeSi.

Citation Download Citation

Aiko Narazaki, Tadatake Sato, Yoshizo Kawaguchi, and Hiroyuki Niino "Laser ablation plume of FeSi₂ alloy target studied by TOF mass and optical emission spectroscopies", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486562

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available